2013 | Invited Paper: Performance of the Proof-of-Concept Multi-Beam Mask Writer (MBMW POC)

SPIE Photomask Technology BACUS 2013

Vol-8880 · © 2013 SPIE · CCC code: 0277-786X/16/$18 · doi: 10.1117/12.2243638

Christof Klein, Hans Loeschner, and Elmar Platzgummer