News

September 7, 2017
IMS presents at SPIE Photomask Technology | BACUS´17, 11-14 Sept. 2017, Monterey/CA

Februar 28, 2017
IMS and JEOL partner to provide world’s 1st production Multi-Beam Mask Writer

VIENNA–(BUSINESS WIRE)–IMS Nanofabrication AG (“IMS”) and JEOL Ltd. (“JEOL”) announced today they have reached a long term agreement to extend their business partnership for the production of the IMS MBMW-101, the world’s first commercial high volume manufacturing Multi-Beam Mask Writer (MBMW). IMS manufactures a multi-beam write engine providing 262-thousand programmable beams of 50keV energy. JEOL provides a novel platform with an air-bearing vacuum stage for writing most advanced patterns on 6-inch mask blanks. Together, IMS and JEOL will supply the MBMW-101 to the industry’s leading edge photomask manufacturers.

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September 8, 2016
Executive Interview of Elmar Platzgummer by Mark LaPedus at BACUS´16

September 15, 2015
Invited presentation of Elmar Platzgummer / CEO at SEMICON Taiwan

Advanced Technologies in Accelerating Digital Era and IoT Forum, Electron Multi-Beam Technology for Mask and Wafer Direct Write