IMS and JEOL partner to provide world’s 1st production Multi-Beam Mask Writer

VIENNA–(BUSINESS WIRE)–IMS Nanofabrication AG (“IMS”) and JEOL Ltd. (“JEOL”) announced today they have reached a long term agreement to extend their business partnership for the production of the IMS MBMW-101, the world’s first commercial high volume manufacturing Multi-Beam Mask Writer (MBMW). IMS manufactures a multi-beam write engine providing 262-thousand programmable beams of 50keV energy. JEOL provides a novel platform with an air-bearing vacuum stage for writing most advanced patterns on 6-inch mask blanks. Together, IMS and JEOL will supply the MBMW-101 to the industry’s leading edge photomask manufacturers.

Read entire article